| 摘要 |
PROBLEM TO BE SOLVED: To provide a pellicle capable of reducing mask strain when crimped to a mask.SOLUTION: There is provided a pellicle comprising: a pellicle frame; a pellicle film which is provided on one end face of the pellicle frame; and an adhesive layer adhered to the other end face of the pellicle frame. The adhesive layer has a residual stress value after 20% extension/24 hours relaxing, of 1.0 mN/mmor more and 12.0 mN/mmor less.SELECTED DRAWING: Figure 1 |
