| 摘要 |
PURPOSE:To provide the excimer laser oscillator with high efficiency capable of decreasing the laser gas flow rate during highly repeated laser oscillating operation time while avoiding the local concentration of discharge. CONSTITUTION:In the excimer laser oscillator provided with main discharge electrode 1 exciting a laser gas and preliminary ionizing electrodes 3 before main-discharging the excited laser gas, the preliminary ionizing electrode 3 are arranged on upstream side of the main discharge electrodes 1 while reflecting panels 4 are provided around the preliminary ionizing electrodes 3. On the other hand, the reflecting panels 4 may be substituted with optical fiber devices leading a part of ultraviolet rays from the preliminary ionizing electrodes 3 to the main discharging part. |
