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经营范围
发明名称
METHOD FOR MANUFACTURING POLYMERIC THIN FILM
摘要
申请公布号
KR0160910(B1)
申请公布日期
1999.02.01
申请号
KR19950052652
申请日期
1995.12.20
申请人
KOREA ELECTRONICS & TELECOMMUNICATIONS RESEARCH INSTITUTE
发明人
JUNG, SANG-DONN;SONG, SUK-HO;JUNG, JONG-SOOL
分类号
H01L21/31;(IPC1-7):H01L21/31
主分类号
H01L21/31
代理机构
代理人
主权项
地址
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