| 摘要 |
PROBLEM TO BE SOLVED: To provide an accurate and reliable linear motor by eliminating thermal deformation of a core and a table. SOLUTION: The linear motor 3 comprises a stator 4, on which a plurality of permanent magnets different polarity are arranged alternately, and a moving unit 5 that is placed with a air gap between the moving unit and the stator 4 and constitutes an armature formed by winding a plurality of coils 0 on a core 8 having slots 8A. The linear motor 3 is provided with a cooling unit 12, having coolant passages 13 between the moving unit 5 and the table 10 with a load, and the moving unit 5 is provided with thin sheet-like heat pipes 14 on the faces thereof in a direction orthogonal to the faces opposed to the stator 4 with a magnetic air gap in between. The heat receiving portions of the sheet-like heat pipes 14 are brought into contact with the surface of the unit 5, and part of the heat-radiating portions thereof is brought into contact with the cooling unit 12. Thus heat produced at the armature is removed efficiently by the sheet-like heat pipes 14, and heat transfer to the core 8 and the table 10 and thermal deformation of the core and the table is suppressed.
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