| 摘要 |
PROBLEM TO BE SOLVED: To make a washing apparatus, which has a structure to maintain the cleanliness of a solvent by distillating the solvent in the apparatus, have a structure which can effectively prevent the mixing of particles into the solvent. SOLUTION: In the apparatus, at least one of a rotation driving device 10 and an elevation driving device 11 is arranged above washing tanks 3 to 5, the one of these rotation driving device 10 and elevation driving device 11 which has been arranged above the washing tanks 3 to 5 is made detachable from and attachable to the washing tanks 3 to 5, and a connecting part 36 of shafts 14 and 15 which rotate and are elevated and lowered by being connected to the rotation driving device 10 and the elevation driving device 11, and the washing tanks 3 to 5, is arranged below the opening edges of the washing tanks 3 to 5, and also, a solvent receiving member 90 to prevent the solvent, which flows into the washing tanks 3 to 5 along the shafts 14 and 15, to pass a sliding part 99 where members rub against each other on the shafts 14 and 15, and a guide member 91 for guiding this solvent to the washing tanks 3 to 5, are provided. COPYRIGHT: (C)2005,JPO&NCIPI
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