发明名称 ELECTRONIC COMPONENT MANUFACTURING METHOD
摘要 <p>An electronic component manufacturing method wherein troubles due to outgassing from a sacrificial layer and residuals after sacrificial layer removal are prevented. The electronic component manufacturing method has a first step of forming on a substrate (12) the sacrificial layer which has polyamide-imide as a main component, a second step of forming an element section on a part of the sacrificial layer, and a third step of forming a space (11) between the element section and the substrate (12).</p>
申请公布号 WO2006134744(A1) 申请公布日期 2006.12.21
申请号 WO2006JP309719 申请日期 2006.05.16
申请人 MURATA MANUFACTURING CO., LTD.;FUJII, HIDETOSHI;OGUCHI, TAKAHIRO 发明人 FUJII, HIDETOSHI;OGUCHI, TAKAHIRO
分类号 H01L41/09;B81C1/00;H01L41/08;H01L41/18;H01L41/187;H01L41/22;H03H3/02;H03H9/17 主分类号 H01L41/09
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