发明名称 |
ELECTRONIC COMPONENT MANUFACTURING METHOD |
摘要 |
<p>An electronic component manufacturing method wherein troubles due to outgassing from a sacrificial layer and residuals after sacrificial layer removal are prevented. The electronic component manufacturing method has a first step of forming on a substrate (12) the sacrificial layer which has polyamide-imide as a main component, a second step of forming an element section on a part of the sacrificial layer, and a third step of forming a space (11) between the element section and the substrate (12).</p> |
申请公布号 |
WO2006134744(A1) |
申请公布日期 |
2006.12.21 |
申请号 |
WO2006JP309719 |
申请日期 |
2006.05.16 |
申请人 |
MURATA MANUFACTURING CO., LTD.;FUJII, HIDETOSHI;OGUCHI, TAKAHIRO |
发明人 |
FUJII, HIDETOSHI;OGUCHI, TAKAHIRO |
分类号 |
H01L41/09;B81C1/00;H01L41/08;H01L41/18;H01L41/187;H01L41/22;H03H3/02;H03H9/17 |
主分类号 |
H01L41/09 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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