| 摘要 |
PURPOSE:To grasp surface configuration of a specimen three-dimensionally by dividing a piezoelectric transducer of an ultrasonic probe into four parts, and providing patterns of combinations of transmission and reception between the vibrators from two directions X, Y. CONSTITUTION:A piezoelectric transducer of a configuration measuring sensor 1 is divided into four parts A, A', B, B' and a sensor 1 is installe on e.g. a specimen 4 having a slope in the X direction and ultrasonic waves are transmitted from the transducer A and the reflected waves from the (a) point are received at the A' point. Also, ultrasonic waves are transmitted from a piezoelectric transducer B and the reflected waves from the (b) point are received at the B' point. The intensity of the waves received at the A' point is compared with that of the waves received at the B' point so as to calculate the direction and gradient of the slope of the surface 5 of the specimen 4. When the gradient of the surface 5 extends in the Y direction this is the same as when the gradient of the surface 5 extending in the X diection is rotated by 90 degrees and in that case ultrasonic waves are transmitted from the transducers A' and A and received at the transducers B' and B, respectively. The waves are synthesized with each other whereby the surface configuration of the specimen 4 can be grasped three-dimensionally. |
