| 摘要 |
PROBLEM TO BE SOLVED: To obtain a stable coating without breakage due to N2 gas produced by decomposition of silicon nitride by precoating the surface of a ceramic part, used at high temperatures and consisting essentially of silicon nitride with alumina or zirconia before coating the surface with platinum when coating the surface with the platinum in order to impart electroconductivity. SOLUTION: A precoating 6, having preferably about 1μm thickness and composed of alumina or zirconia is applied by a physical vapor deposition(PVD) method, e.g. sputtering or ion plating before applying a platinum coating 7 thereto. The top surface of the first layer 6 of the precoating is then coated with platinum of the second layer 7 and the thickness thereof is preferably about 5μm. The platinum coating is preferably further coated with the third layer 8 composed of alumina or zirconia in order to protect the platinum coating 7. The thickness thereof is preferably about 10μm.
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