EXIMER LASER, FIXING MEANS AND FIXING METHOD FOR OPTICAL PART THEREOF

摘要

PROBLEM TO BE SOLVED: To fix optical parts of an eximer laser without degrading its waveform characteristics. SOLUTION: Fixing means for an optical part of an eximer laser comprises a presser plate 18 contacting to a presser surface for the optical part and presser means for the pressing plate 18 in a predetermined pressing direction. Here, the optical part is fixed by the fixing means in such a manner that a region 13 where the index of refraction extending the contact surface between the presser plate 18 and the optical part in the pressing direction stated above is not uniform, and the laser beam 3 can be formed at a position separated by a predetermined distance from a transmitting region 28 where the laser beam 3 transmits through the optical part.