发明名称 TRANSPORTING DEVICE AND METHOD FOR A SUBSTRATE
摘要 PURPOSE: A substrate transport apparatus and a transfer method used in a substrate manufacturing process of a display device are provided to improve productivity and reduce tact time by loading/unloading the non-manufacturing substrate. CONSTITUTION: A substrate transport apparatus(100) includes a main body(110), an arm, hands, and a controller. The main body includes at least two driving shafts. The arm is connected to at least two driving shafts. The hands settle the substrate connected to the arms. The controller controls the driving shaft, and arms and hands. The driving shafts include a first drive shaft and a second driving shaft in a traveling direction of the main body.
申请公布号 KR20090120914(A) 申请公布日期 2009.11.25
申请号 KR20080046966 申请日期 2008.05.21
申请人 LG DISPLAY CO., LTD. 发明人 KIM, DONG HAN
分类号 H01L21/68;H01L21/67 主分类号 H01L21/68
代理机构 代理人
主权项
地址