PIEZOELECTRIC ELEMENT AND MANUFACTURING METHOD THEREFOR, LIQUID INJECTION HEAD, LIQUID INJECTION DEVICE AND ULTRASONIC MEASUREMENT DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a piezoelectric element which allows for manufacturing of a first electrode oriented to (110) plane inexpensively.SOLUTION: A piezoelectric element includes a first electrode 60 formed on a substrate 10 via an orientation control layer 57, a piezoelectric layer 70 formed on the first electrode 60, and a second electrode 80 formed on the piezoelectric layer 70. The orientation control layer 57 is composed of a complex oxide having a perovskite structure oriented preferentially to the (100) plane, and the first electrode 60 is oriented preferentially to the (110) plane.SELECTED DRAWING: Figure 2