| 摘要 |
Disclosed is a method for producing a sintered body, which is characterized in that raw material powders respectively composed of a chalcogenide element and a Vb group element or raw material powders of an alloy of two or more elements including a chalcogenide element and a Vb group element are mixed, and the thus-mixed powder is hot pressed under the conditions satisfying the following formula: P (pressure) = {Pf/(Tf-T0)} OE(T-T0) + P0 (Pf: final pressure, Tf: final temperature, P0: atmospheric pressure, T: heating temperature, T0: room temperature (temperatures are expressed in degrees Celsius)). This method enables to produce a sintered body which has high density, high strength and large diameter, while containing a chalcogenide element (A) and a Vb group element (B) or containing the elements (A) and (B) and additionally a IVb group element (C) and/or an additive element (D). This sintered body does not suffer from cracks when assembled into and used in a sputtering target-backing plate assembly. Also disclosed are such a sintered body, a sputtering target composed of such a sintered body, and a sputtering target-backing plate assembly. |
