Grinding wheel design with elongated teeth arrangement

摘要

A grinding wheel includes a base disk, and a plurality of teeth protruding beyond a surface of the base disk. The plurality of teeth is aligned to an elongated ring encircling a center of the grinding wheel.

主权项

1. An apparatus for grinding a wafer, the apparatus comprising:
a grinding wheel configured to rotate around a first axis, the grinding wheel comprising:
a base disk; anda plurality of teeth protruding beyond a surface of the base disk, wherein the plurality of teeth is aligned to an elongated ring encircling a center of the grinding wheel; and a turntable configured to rotate around a second axis misaligned from the first axis; and a chuck over the turntable and configured to rotate along with the turntable, wherein the grinding wheel faces a portion of the chuck, wherein the plurality of teeth is configured so that when a tooth having a minimum distance from the first axis passes through a connecting line pointing from the first axis to the second axis, the tooth overlaps the second axis, and the minimum distance is equal to or greater than a distance between the first axis and the second axis.