| 发明名称 |
CRYOPUMP SYSTEM, CRYOPUMP CONTROLLER, AND CRYOPUMP REGENERATION METHOD |
| 摘要 |
A cryopump system includes a cryopump, and a regeneration control unit that controls the cryopump according to a regeneration sequence including a discharge process of rough pumping the cryopump to discharge condensate from it. The regeneration control unit includes a pressure drop rate computation unit that computes a pressure drop rate for the cryopump during the rough pumping of the cryopump, and a pressure drop rate monitoring unit that detects diminishment in the pressure drop rate during the rough pumping. |
| 申请公布号 |
US2016245270(A1) |
申请公布日期 |
2016.08.25 |
| 申请号 |
US201615043507 |
申请日期 |
2016.02.13 |
| 申请人 |
SUMITOMO HEAVY INDUSTRIES, LTD. |
发明人 |
YATSU Takahiro |
| 分类号 |
F04B37/08 |
主分类号 |
F04B37/08 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A cryopump system, comprising:
a cryopump; and a regeneration control unit that controls the cryopump according to a regeneration sequence including a discharge process whereby rough pumping of the cryopump is performed, the discharge process discharging condensate from the cryopump; wherein the regeneration control unit includes
a pressure drop rate computation unit that computes a pressure drop rate for the cryopump during the rough pumping of the cryopump, anda pressure drop rate monitoring unit that detects diminishment in the pressure drop rate during the rough pumping. |
| 地址 |
Tokyo JP |
