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发明名称
CVD METHOD
摘要
申请公布号
JPH0411730(A)
申请公布日期
1992.01.16
申请号
JP19900114694
申请日期
1990.04.28
申请人
RES DEV CORP OF JAPAN
发明人
HORIIKE YASUHIRO
分类号
H01L21/205;H01L21/316
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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