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发明名称
ION IMPLANTATION NEUTRALIZING METHOD AND DEVICE
摘要
申请公布号
JPH0661166(A)
申请公布日期
1994.03.04
申请号
JP19920235217
申请日期
1992.08.10
申请人
NISSIN ELECTRIC CO LTD
发明人
SAKAI SHIGEKI
分类号
H01J37/317;H01L21/265;(IPC1-7):H01L21/265
主分类号
H01J37/317
代理机构
代理人
主权项
地址
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