FILM-FORMATION METHOD OF SIN-BASED INSULATING FILM,申请号JP19940193075-传众专利搜索

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发明名称	FILM-FORMATION METHOD OF SIN-BASED INSULATING FILM
摘要
申请公布号	JPH0855851(A)	申请公布日期	1996.02.27
申请号	JP19940193075	申请日期	1994.08.17
申请人	SONY CORP	发明人	SATO JUNICHI
分类号	H05H1/46;C23C16/34;C23C16/511;H01L21/205;H01L21/31;H01L21/318;(IPC1-7):H01L21/318	主分类号	H05H1/46
代理机构		代理人
主权项
地址

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