APPARATUS AND METHOD FOR DEPOSITING A MATERIAL ON A SUBSTRATE
摘要
Apparatus (12, 12a) and a method for depositing a material on a substrate (G) utilizes a distributor (22) including a heated permeable member (24) through which a carrier gas and a material are passed to provide a vapor that is deposited on a conveyed substrate. The permeable member (24) is tubular and has an electrical voltage applied along its length to provide the heating, and the carrier gas and the material as a powder are introduced into the tubular permeable member for flow outwardly therefrom as the vapor. A shroud (34) extending around the tubular permeable member (24) has an opening (36) through which the vapor flows for the deposition. In one embodiment of apparatus (12), the vapor is deposited on an upwardly facing surface (56) of the substrate, while another embodiment of the apparatus (12a) deposits the vapor on a downwardly facing surface (54) of the substrate.
申请公布号
WO9942634(A1)
申请公布日期
1999.08.26
申请号
WO1999US01142
申请日期
1999.01.20
申请人
SOLAR CELLS, INC.;POWELL, RICKY, C.;DORER, GARY, L.;REITER, NICHOLAS, A.;MCMASTER, HAROLD, A.;COX, STEVEN, M.;KAHLE, TERENCE, D.