发明名称 |
Ion source |
摘要 |
A cathode holder of a tubular shape is inserted into an opening for a cathode of a plasma generating chamber with a tip of the cathode holder positioned outward from an inner wall surface of the plasma generating chamber. The cathode is held in the cathode holder so that a front surface of the cathode will be positioned outward from the inner wall surface. In the cathode holder is provided a tubular first heat shield surrounding the cathode with a space provided between the first heat shield and the cathode, the tip of the first heat shield positioned outward from the inner wall surface. At a rear side of the cathode is provided a filament. The gap between the cathode holder and the plasma generating chamber is filled with an electrical insulating material.
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申请公布号 |
US7365339(B2) |
申请公布日期 |
2008.04.29 |
申请号 |
US20060434891 |
申请日期 |
2006.05.17 |
申请人 |
NISSIN ION EQUIPMENT CO., LTD. |
发明人 |
FUJITA HIDEKI;UMISEDO SEI;HAMAMOTO NARIAKI |
分类号 |
H01J49/10;H01J27/02;H01J37/08;H01J49/16 |
主分类号 |
H01J49/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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