PURIFICATION PROCESS OF FLUORINE-BASED SOLVENT-CONTAINING SOLUTION, PURIFICATION APPARATUS AND CLEANING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a purification process where a fluorine-based solvent can be obtained at high purity by relatively small equipment without using a distillation apparatus. SOLUTION: The purification process of a mixed solution containing the fluorine-based solvent is a process for purifying the fluorine-based solvent from a mixed solution containing the fluorine-based solvent, a water-soluble organic solvent, an organic contaminant and an ion contaminant. The process comprises a step (1) of washing the mixed solution with water to obtain a first treated solution in which the water-soluble organic solvent concentration is reduced to 0.01 wt.% or less, a step (2) of treating the first treated solution with activated carbon to obtain a second treated solution in which the organic contaminant concentration is reduced to 20 ppb or less, a step (3) of treating the second treated solution with activated alumina to obtain a third treated solution in which the fluoride ion contaminant is reduced to 10 ppb or less, and a step (4) of treating the third treated solution with a particle-removing filter to obtain a fluorine-based solvent in which the number of particles of 0.1μm or more is 10 particles/mL or less. COPYRIGHT: (C)2008,JPO&INPIT