| 摘要 |
FIELD: gas.SUBSTANCE: invention relates to gas analysis, specifically to methods of identification of composition of multicomponent gas mixes. Object of invention is to provide a method for analysis of gas composition of environment by measuring impedance (impedance) of gas sensitive semiconductor layer, a segmented set of coplanar electrodes in a multi-chip, when exposed to different atmospheres, which provides qualitative recognition thereof. Important feature of method is use of low frequency (10-10Hz) in which impedance change caused by adsorption of gases allows for slow charge transport processes in gas-sensitive semiconductor material that defines a corresponding change in equivalent circuit elements used in method for solving problem of analysis of gas composition. Measurement a larger number of sensor chip segments can increase dimension of analysed vector signals and increase accuracy of identifying gas.EFFECT: technical result is to increase accuracy of analysis of he composition of gaseous medium using multi-touch chip in accordance with principles of operation of device type of “electronic nose” by increasing number of characteristics used to construct vector response, sensitive to form of gaseous medium, by defining a set of parameters that change when exposed to gases, by measuring spectrum (or frequency dependence) impedance individual sensor chip segments.6 cl, 7 dwg |
