| 摘要 |
<p>A micromachined magnetostatic relay or switch (100) includes a springing beam (105) on which a magnetic actuation plate (120) is formed. The springing beam (105) also includes an electrically conductive contact (115). In the presence of a magnetic field H, the magnetic material causes the springing beam (105) to bend, moving the electrically conductive contact either toward or away from another contact, and thus creating either an electrical short-circuit or an electrical open-circuit. The switch (100) is fabricated from silicon substrates and is particularly useful in forming a MEMs communication and control circuit for a miniaturized DC motor.</p> |
