发明名称 APPARATUS AND METHOD FOR TESTING ARRAY OF ELECTRODE
摘要 PROBLEM TO BE SOLVED: To make detectable a short circuit between electrodes adjacent to each other by biasing half of electrodes by bias voltage, and biasing the remained half of the voltage by bias voltage of opposite polarity, for alternately biasing the electrodes. SOLUTION: Electrodes 21 on a tile 20 are parallel to each other, and alternately exposed to one of sides of the tile 20. According to this constitution, the width of the electrodes 21 can be widened at a contact end. The tile 20 is mounted on two rails 22, 23 so that half of electrodes alternately come into contact with the rail 22 or the rail 23. The power is fed to the rail 22 with a certain bias potential, and the power is fed to the rail 23 with the voltage equal to the opposite bias voltage. Two rails 22, 23 behave as a feeding means for biasing half of electrodes with a certain bias voltage, and alternately feeding the opposite bias voltage to the other half of electrodes. The bias voltage is sinusoidal, and equal to, for example, V*sin(wt), and the opposite bias voltage is selected to be equal to -V* sin(wt).
申请公布号 JP2000356664(A) 申请公布日期 2000.12.26
申请号 JP20000092136 申请日期 2000.03.29
申请人 THOMSON PLASMA 发明人 DESCHAMPS JACQUES
分类号 G01R31/02;G01R31/312;G09F9/00;G09G3/00;H01J9/42;H01J11/02;H04N5/66;H04N17/04;(IPC1-7):G01R31/02 主分类号 G01R31/02
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