EXPOSURE METHOD AND EXPOSURE APPARATUS

摘要

A substrate, a first photomask and a second photomask are highly accurately aligned. Three alignment marks (22, 25, 26) at corresponding positions on the flexible substrate (10), the first photomask (11) and the second photomask (12) are read at the same time by a CCD camera. Based on the mark position information from the read images, a relative position between the flexible substrate (10) and the first photomask (11) and that between the flexible substrate (10) and the second photomask (12) are adjusted and alignment is performed.