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发明名称
Use of cleaning gas
摘要
申请公布号
EP1020236(B1)
申请公布日期
2007.11.28
申请号
EP20000100440
申请日期
2000.01.10
申请人
CENTRAL GLASS COMPANY, LIMITED;TOKYO ELECTRON LIMITED
发明人
MOURI, ISAMU;TAMURA, TETSUYA;OHASHI, MITSUYA;KAWASHIMA, TADAYUKI;MATSUDO, MASAHIKO;HATANO, TATSUO
分类号
B08B5/00;H01L21/302;B08B9/00;C23C14/56;C23C16/44;C23F1/12;H01L21/205;H01L21/285;H01L21/304;H01L21/3065;H01L21/31
主分类号
B08B5/00
代理机构
代理人
主权项
地址
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