发明名称 Method for manufacturing array substrate and method for forming through hole
摘要 A method for manufacturing an array substrate and a method for forming a through hole are provided. The method for manufacturing the array substrate comprise: coating photoresist in an insulating layer through-hole region on a substrate; depositing an insulating layer on the substrate provided with the photoresist in the insulating layer through-hole region; and stripping off the photoresist in the insulating layer through-hole region to form an insulating layer through hole. The manufacturing method simplifies the process of forming the insulating layer through hole.
申请公布号 US9379146(B2) 申请公布日期 2016.06.28
申请号 US201414429247 申请日期 2014.07.18
申请人 BOE Technology Group Co., Ltd. 发明人 Zhang Li;Yan Liangchen;Liu Fengjuan
分类号 H01L21/768;H01L21/283;H01L27/12;H01L29/417;H01L29/423;H01L29/66 主分类号 H01L21/768
代理机构 Banner & Witcoff, Ltd. 代理人 Banner & Witcoff, Ltd.
主权项 1. A method for forming a through hole, comprising: coating photoresist on a substrate, and forming the photoresist into a photoresist portion in an insulating layer through-hole region; depositing an insulating layer on the substrate provided with the photoresist portion in the insulating layer through-hole region; and stripping off the photoresist portion in the insulating layer through-hole region to form an insulating layer through hole.
地址 Beijing CN
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