发明名称 |
Method for manufacturing array substrate and method for forming through hole |
摘要 |
A method for manufacturing an array substrate and a method for forming a through hole are provided. The method for manufacturing the array substrate comprise: coating photoresist in an insulating layer through-hole region on a substrate; depositing an insulating layer on the substrate provided with the photoresist in the insulating layer through-hole region; and stripping off the photoresist in the insulating layer through-hole region to form an insulating layer through hole. The manufacturing method simplifies the process of forming the insulating layer through hole. |
申请公布号 |
US9379146(B2) |
申请公布日期 |
2016.06.28 |
申请号 |
US201414429247 |
申请日期 |
2014.07.18 |
申请人 |
BOE Technology Group Co., Ltd. |
发明人 |
Zhang Li;Yan Liangchen;Liu Fengjuan |
分类号 |
H01L21/768;H01L21/283;H01L27/12;H01L29/417;H01L29/423;H01L29/66 |
主分类号 |
H01L21/768 |
代理机构 |
Banner & Witcoff, Ltd. |
代理人 |
Banner & Witcoff, Ltd. |
主权项 |
1. A method for forming a through hole, comprising:
coating photoresist on a substrate, and forming the photoresist into a photoresist portion in an insulating layer through-hole region; depositing an insulating layer on the substrate provided with the photoresist portion in the insulating layer through-hole region; and stripping off the photoresist portion in the insulating layer through-hole region to form an insulating layer through hole. |
地址 |
Beijing CN |