发明名称 PROCESS SIMULATOR
摘要 PROBLEM TO BE SOLVED: To provide a process simulator capable of simulating an arbitrary part of manufacturing processes. SOLUTION: A process data forming part 1 forms process data in which manufacturing processes are described. A converter 3 converts the above process data, which are collectively converted to an input date in the ordinary case, to an input date which can be recognized with a specified simulator, by using a part of the process data or dividing the process data. A simulator 5 simulates manufacturing processes in accordance with the input date converted with the converter 3. When the input date are the data regarding a series of manufacturing processes, the simulation result of the upper stream processes is used as the initial condition of the down stream processes.
申请公布号 JPH09260234(A) 申请公布日期 1997.10.03
申请号 JP19960094772 申请日期 1996.03.25
申请人 SONY CORP 发明人 KIMURA MITSUNORI
分类号 B23P21/00;B65G61/00;G05B19/418;G06F19/00;G06Q50/00;G06Q50/04;H01L21/00;H01L21/02 主分类号 B23P21/00
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