发明名称 SUBSTRATE CLEANING DEVICE
摘要 PROBLEM TO BE SOLVED: To make efficiently eliminable dusts or the like stuck to the surface of a magnetic transfer master disk. SOLUTION: A cleaner disk 7 and a master disk 1 are rotated, the cleaner disk 7 having a radius roughly coincident with the curvature radius of a circular-arc projecting part 2 radially arrayed on the surface of the master disk 1, and the rotary axis of the cleaner disk 7 is inclined with respect to that of the master disk 1. Further, the rotational center of the cleaner disk 7 is arranged in the curvature center position of the projecting part 2 formed in the master disk 1, and a cleaner pad 8 provided in the outer periphery of the cleaner disk 7 is brought into contact with a part of the surface of the cleaner disk 1. Thus, the surface of the cleaner disk 7 is wiped by the cleaner pad 8 along the projecting part 2.
申请公布号 JP2000285637(A) 申请公布日期 2000.10.13
申请号 JP19990089755 申请日期 1999.03.30
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 HAMADA TAIZO;HASHI HIDEYUKI
分类号 G11B23/50;G11B5/84;G11B5/86;(IPC1-7):G11B23/50 主分类号 G11B23/50
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