发明名称 ORGANIC ZIRCONIUM COMPOUND, ORGANIC SOLUTION CONTAINING THE SAME AND ZIRCONIUM-CONTAINING THIN FILM PREPARED BY USING THE SAME
摘要 PROBLEM TO BE SOLVED: To obtain an organic zirconium compound having a decomposition temperature lower than that of conventional Zr compounds, approximating to the decomposition temperature of Pb, Ti compounds, having little vaporization residue, hardly reactive when mixed with Pb, Ti compounds and leaving little vaporization residue. SOLUTION: This organic zirconium compound is expressed by general formula (1). R expresses a 4-5C branched alkyl; L1 , L2 and L3 are each aβdiketone compound and mutually the same or different. As an example of the aforesaid compound, t-butoxy tris2,2,6,6-tetramethyl3,5-heptadionate zirconium, (tBuO)1 (thd)3 is cited and the mass spectrum of the same is shown in figure 1.
申请公布号 JP2002275121(A) 申请公布日期 2002.09.25
申请号 JP20010045877 申请日期 2001.02.22
申请人 MITSUBISHI MATERIALS CORP 发明人 HIRAKOSO HIDEYUKI;OKAMURA SHINGO;UCHIDA HIROTO;OGI KATSUMI
分类号 C07C49/92;B32B9/00;C07F7/00;C23C16/40;(IPC1-7):C07C49/92 主分类号 C07C49/92
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