| 发明名称 |
ABRASIVE PARTICULATE MATERIAL, AND METHOD OF PLANARIZING A WORKPIECE USING THE ABRASIVE PARTICULATE MATERIAL |
| 摘要 |
An abrasive particulate material is disclosed that includes alumina particles. The alumina particles include a transition alumina and at least 5.0 wt % of an amorphous phase. The transition alumina particles also have a density not greater than about 3.20 g/cm |
| 申请公布号 |
UA87938(C2) |
申请公布日期 |
2009.08.25 |
| 申请号 |
UA20080004717 |
申请日期 |
2006.10.13 |
| 申请人 |
SAINT-GOBAIN CERAMICS & PLASTICS, INC. |
发明人 |
HAERLE ANDREW G.;WANG JUN |
| 分类号 |
C09K3/14;C01F7/02;H01L21/306 |
主分类号 |
C09K3/14 |
| 代理机构 |
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