Metal elastic member, miniature machine, method of manufacturing miniature machine, swing control device and swing control method

摘要

A metal elastic member to be used for beams 4 for supporting a movable unit 3 at respective ends with respect to a fixed unit 2 in a miniature machine including at least one movable unit 3, the fixed unit 2 and the beams 4 , and capable of swinging the movable unit about an axis P with the beams 4 serving as torsional rotation axes, includes a metal bar 4a having a predetermined length, a fixed unit pad 4b that is provided at a first end of the metal bar 4a and is fixed to the fixed unit 2, and a movable unit pad 4c formed on the other end side of the metal bar 4a and fixed to the movable unit 3. At least the metal bar 4a is molded to have a sectional area of 1 mm2 or less by using a physical or chemical processing method excluding a mechanical processing method and swings the movable unit 3 within a frequency of 150 Hz to 500 Hz.

主权项

1. A method of manufacturing a miniature machine including at least one movable unit, a fixed unit and paired beams for supporting the movable unit at the respective ends with respect to the fixed unit and capable of swinging the movable unit about an axis with the beams serving as torsional rotation axes,
the method comprising the steps of: positioning and disposing a metal elastic member in the fixed unit and/or the movable unit in a state in which the metal bar and each of the pads are supported by the frame, the metal elastic member including a metal bar molded to have a sectional area of 1 mm2 or less by using a physical or chemical processing method excluding a mechanical processing method and having a predetermined length which swings the movable unit, a fixed unit pad that is provided at a first end of the metal bar and is fixed to the fixed unit, a movable unit pad that is provided at a second end of the metal bar and is fixed to the movable unit, and a frame, and having a pair of the metal bars disposed symmetrically on a straight line in the frame and a plurality of support units for coupling the frame to each of the pads formed integrally by using the physical or chemical processing method excluding the mechanical processing method; fixing the fixed unit and/or the movable unit to each of the pads; and cutting each of the support units to separate the frame after fixing the fixed unit and/or the movable unit to each of the pads.