| 主权项 |
1. A laser device comprising:
a laser resonator generating laser light, a cooling water feed device feeding cooling water to the laser resonator for cooling the laser resonator, a water temperature gauge measuring a temperature of cooling water fed to the laser resonator, a temperature/humidity adjusting device adjusting at least one of a temperature and humidity of a space in which the laser resonator is set, a thermometer measuring a temperature of air adjusted by the temperature/humidity adjusting device, a hygrometer measuring a humidity of air adjusted by the temperature/humidity adjusting device, a controlling part calculating a reference temperature or reference humidity judging if the cooling water feed device may feed cooling water based on the temperature measured by the thermometer and the humidity measured by the hygrometer, and a comparing part comparing the reference temperature and the cooling water temperature or comparing the reference humidity and the humidity measured by the hygrometer, wherein the cooling water feed device configured to stop the feed of cooling water after a command for starting up the laser resonator has been output and the cooling water temperature is lower than the reference temperature or when the humidity measured by the hygrometer is higher than the reference humidity and to start or continue the feed of cooling water when the cooling water temperature is the reference temperature or more or when the humidity measured by the hygrometer is the reference humidity or less. |
