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发明名称
摘要
申请公布号
JP2685189(B2)
申请公布日期
1997.12.03
申请号
JP19870248819
申请日期
1987.10.01
申请人
发明人
分类号
B65G51/02;B65G47/78;B65G47/88;H01L21/677;H01L21/68;(IPC1-7):B65G47/88
主分类号
B65G51/02
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