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发明名称
MANUFACTURE OF HOLE SENSOR
摘要
申请公布号
JPH11251344(A)
申请公布日期
1999.09.17
申请号
JP19980049655
申请日期
1998.03.02
申请人
HITACHI CABLE LTD
发明人
KUNITAKE EIICHI
分类号
H01L21/56;(IPC1-7):H01L21/56
主分类号
H01L21/56
代理机构
代理人
主权项
地址
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