发明名称 APPARATUS FOR COOLING
摘要 A cooling apparatus is disclosed that has a first cooling structure (220), in thermal contact with a heat source (210) having a temperature greater than a cool structure (250), comprising a channel through which a cooling fluid is passed, an isolator (230) between the heat source and the cool structure, the isolator in thermal contact with the first cooling structure and comprising a material of low thermal conductivity, and a second cooling (240) structure between the isolator and the cool structure, the second cooling structure comprising a channel through which cooling fluid is passed.
申请公布号 WO2008072031(A3) 申请公布日期 2008.09.12
申请号 WO2006IB04286 申请日期 2006.11.16
申请人 ASML NETHERLANDS B.V.;HOL, SVEN ANTOIN JOHAN;DE KLERK, ANGELO CESAR PETER;LOOPSTRA, ERIK, ROELOF;JACOBS, FRANSICUS MATHIJS;SCHOLTEN, MARK 发明人 HOL, SVEN ANTOIN JOHAN;DE KLERK, ANGELO CESAR PETER;LOOPSTRA, ERIK, ROELOF;JACOBS, FRANSICUS MATHIJS;SCHOLTEN, MARK
分类号 G03F7/20 主分类号 G03F7/20
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