Actuator, robot hand, robot, electronic component carrying device, electronic component inspection device, and printer

摘要

An actuator includes a vibrating piezoelectric element, and a holding unit that holds the piezoelectric element, in which the holding unit is disposed on a vibrating surface of the piezoelectric element, and includes a first support unit and a second support unit that are disposed on one side of the piezoelectric element, and a third support unit and a fourth support unit that are disposed on the other side of the piezoelectric element.

主权项

1. An actuator comprising:
a piezoelectric element that vibrates by exciting a bending vibration mode, or vibrates by simultaneously exciting the bending vibration mode and a longitudinal vibration mode; a driven body that contacts a contacting portion of the piezoelectric element, and is driven by a vibration of the contacting portion; a holding unit that holds the piezoelectric element; and a base that includes a biasing unit which biases the holding unit to the driven body, wherein the holding unit is disposed in a direction intersecting a vibrating surface of the piezoelectric element, and includes:
a first support unit and a second support unit which are disposed on one side of the piezoelectric element,a third support unit which is opposed to the first support unit through the piezoelectric element and is disposed on the other side of the piezoelectric element, anda fourth support unit which is opposed to the second support unit through the piezoelectric element and is also disposed on the other side of the piezoelectric element.