| 摘要 |
PROBLEM TO BE SOLVED: To stably form a plating film of fixed film quality at all times even if a polarization curve is changed owing to an initial surface state, the progression of plating or the like. SOLUTION: The electroplating device comprises: an anode 134; a reference electrode 140 formed on the surface of a substrate and composing a three electrode system with an electrically conductive layer to form into a cathode in the case of electroplating; and a potentiostat 144 of controlling the cathode potential of the electrically conductive layer with the potential of the reference electrode 140 as a reference. COPYRIGHT: (C)2006,JPO&NCIPI
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