Wafer debonding and cleaning apparatus and method of use

摘要

This description relates to a wafer debonding and cleaning apparatus including an automatic wafer handling module. The automatic wafer handling module loads a semiconductor wafer into a wafer debonding module for a debonding process. The automatic wafer handling module removes the semiconductor wafer from the debonding module and loads the semiconductor wafer into a wafer cleaning module for a cleaning process.

主权项

1. A method of debonding and cleaning a wafer, the method comprising:
separating a semiconductor wafer from a carrier wafer using a wafer debonding module; cleaning a surface of the semiconductor wafer using one wafer cleaning module of two wafer cleaning modules; and transferring the semiconductor wafer to/from the wafer debonding module and the wafer cleaning module used to clean the surface of the semiconductor wafer using an automatic wafer handling module; transferring the semiconductor wafer to a storage unit using the automatic wafer handling module if the wafer cleaning modules are determined as not available; and monitoring the availability of the wafer cleaning modules, wherein the semiconductor wafer is transferred from the storage unit to the wafer cleaning module used to clean the surface of the semiconductor wafer when the wafer cleaning module used to clean the surface of the semiconductor wafer is determined to be available, and a quantity of the wafer cleaning modules is greater than a quantity of wafer debonding modules.