ELECTRO-ABSORPTION OPTICAL MODULATION DEVICE AND THE METHOD OF FABRICATING THE SAME

摘要

The present invention provides an electro-absorption optical modulator which comprises an optical waveguide cladding a silicon oxide and using silicon as a core, and an optical modulation unit integrated on the optical waveguide by using a complementary metal oxide semiconductor (CMOS) process and a thermal oxide forming process using a bulk silicon wafer instead of using a silicon-on-insulator (SOI) wafer used for the optical waveguide and the optical modulator; and a manufacturing method thereof.