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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH11102970(A)
申请公布日期
1999.04.13
申请号
JP19980197189
申请日期
1998.07.13
申请人
LG SEMICON CO LTD
发明人
JAE-GYUN AN
分类号
H01L27/04;H01L21/265;H01L21/822;H01L21/8234;H01L27/06;H01L27/088;(IPC1-7):H01L21/823
主分类号
H01L27/04
代理机构
代理人
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