| 摘要 |
PROBLEM TO BE SOLVED: To downsize a sensor device and reduce output errors. SOLUTION: The multi-axial-detection-type angular velocity and acceleration sensor includes, on a substrate 20, a mass of a rectangular form when viewed from a plane, a beam 24 for supporting the mass and a detection part for detecting a displacement amount of the mass being driven when it is displaced by angular velocity around an axis or acceleration in an axial direction in a three-dimensional system comprising three orthogonal axes X, Y, Z. The detection part comprises first detection parts 21b, 27a, 21d, 28a, 21e, 29a, 21g, 30a, a second detection part formed with an opening hole 21a and comprising the opening hole 21a and a first fixed electrode 31 with an end fixed to the substrate and placed in the opening hole 21a, and a third detection part comprising the mass, a case for covering the mass and a second fixed electrode fixed to the substrate 20 so that angular velocity around two axes and acceleration in three axial directions can be detected. |
