| 摘要 |
<P>PROBLEM TO BE SOLVED: To enable discrimination of the cause of a printing failure at the time when it occurs in screen printing equipment. <P>SOLUTION: An X-ray image pickup device such as an X-ray inspection camera 55 which X-rays a prescribed sphere of the superposed portions of a mask sheet having an opening part of a prescribed pattern and a substrate, an image pickup device control means 67 which makes the X-ray image pickup device pick up an image after a paste filling motion for the mask sheet by a squeegee and before a substrate separating motion for the mask sheet, and an inspection means 68, are provided. The inspection means 68 judges the appropriateness of the state of filling of paste in the opening part, based on an X-ray penetration image acquired on the basis of the image pickup by the X-ray image pickup device controlled by the image pickup device control means 67. <P>COPYRIGHT: (C)2008,JPO&INPIT |
