| 摘要 |
<P>PROBLEM TO BE SOLVED: To prevent peeling and swelling from a pressurizing surface plate at polishing work of a back pad for fixing a non-polished surface of a base board being the cause of damage of the base board in a single-side polishing device composed of the back pad for polishing a surface of a plate-like body such as a glass substrate and a wafer, and having the upper side composed of the pressurizing surface plate and a soft resin foaming sheet stuck to this surface plate, a polishing board having the rotating lower side and polishing cloth stuck to this polishing board. <P>SOLUTION: This back pad with crushed pores in an outer peripheral edge part is stuck to a pressurizing surface plate under surface by a double-sided pressure sensitive adhesive tape by heating and pressurizing/compressing an outer peripheral edge part of the back pad of cutting a porous resin foaming sheet stuck with a double-sided pressure sensitive adhesive sheet in a prescribed shape, and is used for this single-side polishing device. <P>COPYRIGHT: (C)2004,JPO |
