| 摘要 |
<p>PURPOSE:To obtain a resistor material for strain gauge which can measure a large strain with high reproducibility by setting variation of resistance constant over a specified range of distortion factor induced by an external stress. CONSTITUTION:An Ti-Ni alloy exhibiting superelasticity is employed as a resistor material and applied as an Ni-Ti alloy thin film 2 onto a substrate 1 thus producing a thin film resistor material for strain gauge. This thin film resistor material can be produced easily and a strain gauge employing this thin film resistor material can measure deformation exceeding the elastic limit.</p> |
