MANUFACTURE OF SOI SUBSTRATE,申请号JP19960065731-传众专利搜索

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发明名称	MANUFACTURE OF SOI SUBSTRATE
摘要
申请公布号	JPH09260622(A)	申请公布日期	1997.10.03
申请号	JP19960065731	申请日期	1996.03.22
申请人	MITSUBISHI MATERIALS CORP;MITSUBISHI MATERIALS SHILICON CORP	发明人	SUDO MITSURU;TAKAMATSU MASARU;NAKAI TETSUYA
分类号	H01L21/265;H01L21/02;H01L27/12;(IPC1-7):H01L27/12	主分类号	H01L21/265
代理机构		代理人
主权项
地址

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