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发明名称
SEMICONDUCTOR DEVICE AND FABRICATION THEREOF
摘要
申请公布号
JPH10163485(A)
申请公布日期
1998.06.19
申请号
JP19960320014
申请日期
1996.11.29
申请人
SONY CORP
发明人
KUBOTA MICHITAKA
分类号
H01L29/78;H01L21/8234;H01L27/088;H01L29/80;(IPC1-7):H01L29/78;H01L21/823
主分类号
H01L29/78
代理机构
代理人
主权项
地址
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