METHOD AND DEVICE FOR PLASMA TREATMENT OF WORK PIECES
摘要
The method and device are used for plasma treatment of work pieces. The work piece (5) is inserted into an at least partially evacuatable chamber (17) of a treatment station (3) and the work piece is positioned inside the treatment station by a retaining element (46). The work piece is impinged upon by the retaining element in such a way that the work piece is guided in the direction of a longitudinal axis of a cavity such that the position thereof can be altered. The work piece is then pressed against a seal with a mouth piece thereof in a treatment position.
申请公布号
EP1507885(A1)
申请公布日期
2005.02.23
申请号
EP20030724886
申请日期
2003.05.09
申请人
SIG TECHNOLOGY LTD.
发明人
LITZENBERG, MICHAEL;MUELLER, HARTWIG;VOGEL, KLAUS;ARNOLD, GREGOR;BEHLE, STEPHAN;LUETTRINGHAUS-HENKEL, ANDREAS;BICKER, MATTHIAS;KLEIN, JUERGEN;LEWIN, FRANK