发明名称 MULTI-LEVEL GETTER STRUCTURE AND ENCAPSULATION STRUCTURE COMPRISING SUCH A MULTI-LEVEL GETTER STRUCTURE
摘要 Getter structure comprising at least: one support;one first layer of getter material arranged on the support;one second layer of getter material such that the first layer of getter material is arranged between the support and the second layer of getter material;one first portion of material mechanically connecting a first face of the second layer of getter material to a first face of the first layer of getter material and forming at least one first space between the first faces of the first and second layers of getter material enabling a circulation of gas between the first faces of the first and second layers of getter material;one first opening crossing through at least the second layer of getter material and emerging into the first space.
申请公布号 US2016176703(A1) 申请公布日期 2016.06.23
申请号 US201514966450 申请日期 2015.12.11
申请人 Commissariat A L'Energie Atomique et aux Energies Alternatives 发明人 BAILLIN Xavier
分类号 B81B7/00;B81C1/00 主分类号 B81B7/00
代理机构 代理人
主权项 1. A getter structure comprising at least: one support; one first layer of getter material arranged on the support; one second layer of getter material such that the first layer of getter material is arranged between the support and the second layer of getter material; one first portion of material mechanically connecting a first face of the second layer of getter material to a first face of the first layer of getter material and forming at least one first space between the first faces of the first and second layers of getter material enabling a circulation of gas between the first faces of the first and second layers of getter material; one first opening crossing through at least the second layer of getter material and emerging into the first space.
地址 Paris FR
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