发明名称 |
MULTI-LEVEL GETTER STRUCTURE AND ENCAPSULATION STRUCTURE COMPRISING SUCH A MULTI-LEVEL GETTER STRUCTURE |
摘要 |
Getter structure comprising at least:
one support;one first layer of getter material arranged on the support;one second layer of getter material such that the first layer of getter material is arranged between the support and the second layer of getter material;one first portion of material mechanically connecting a first face of the second layer of getter material to a first face of the first layer of getter material and forming at least one first space between the first faces of the first and second layers of getter material enabling a circulation of gas between the first faces of the first and second layers of getter material;one first opening crossing through at least the second layer of getter material and emerging into the first space. |
申请公布号 |
US2016176703(A1) |
申请公布日期 |
2016.06.23 |
申请号 |
US201514966450 |
申请日期 |
2015.12.11 |
申请人 |
Commissariat A L'Energie Atomique et aux Energies Alternatives |
发明人 |
BAILLIN Xavier |
分类号 |
B81B7/00;B81C1/00 |
主分类号 |
B81B7/00 |
代理机构 |
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代理人 |
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主权项 |
1. A getter structure comprising at least:
one support; one first layer of getter material arranged on the support; one second layer of getter material such that the first layer of getter material is arranged between the support and the second layer of getter material; one first portion of material mechanically connecting a first face of the second layer of getter material to a first face of the first layer of getter material and forming at least one first space between the first faces of the first and second layers of getter material enabling a circulation of gas between the first faces of the first and second layers of getter material; one first opening crossing through at least the second layer of getter material and emerging into the first space. |
地址 |
Paris FR |