METHOD FOR CONTROLLING ORIENTATION OF OXIDE CERAMIC THIN FILM

摘要

PROBLEM TO BE SOLVED: To provide a method for controlling the orientation of an oxide ceramic thin film in depositing the oxide ceramic thin film onto metal by using a high-temperature plasma containing oxygen. SOLUTION: The orientation of the oxide ceramic thin film can be controlled on Pt by disposing a substrate 106 in plasma flame 105 and adjusting the substrate to the desired position.