发明名称 切削ブレードおよび切削方法
摘要 PROBLEM TO BE SOLVED: To provide a cutting blade capable of reducing frictional heat generated at a processing point between the cutting blade and a hard material, and to provide a cutting method.SOLUTION: A cutting blade 21, formed into a disk shape by binding abrasive grains 4 with a binder 5, is used for cutting into a workpiece held on a holding table while being rotated at a high speed to cut the workpiece. Both faces 5a and 5b of the binder are coated, at a width W1 of at least equal to or greater than a depth D1 of cut in the workpiece, with a material having a thermal conductivity of 200 W/m K or higher.
申请公布号 JP6009238(B2) 申请公布日期 2016.10.19
申请号 JP20120138122 申请日期 2012.06.19
申请人 株式会社ディスコ 发明人 鈴木 稔
分类号 H01L21/301;B24D3/34;B24D5/12 主分类号 H01L21/301
代理机构 代理人
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